AWhen the vacuum chamber is pumped to the leak detection pressure, the leak detector is connected with the vacuum chamber, and the workpiece is filled with helium. If there is a leak in the inspected workpiece, the helium will enter the vacuum chamber through the leak hole, and finally arrive at the helium leak detector to be detected. After the detection is completed, the helium in the workpiece is recovered to achieve the purpose of saving helium. After the inspection is completed, the qualified workpiece is filled with SF6 at the set pressure, and the unqualified workpiece is operated accordingly in the pop-up unqualified processing interface.

AMinimum detectable leak rate ：2x10-13Pa·m3/s Minimum detectable leak rate of suction gun ：5x10 -9Pa·m3/s Pressure at the leak detection port: ：simple detection(2000Pa)/Intermediate inspection(200Pa)/Fine inspection(40Pa) Start-up time ：≤100S Mouthpiece ：RS-232/485 Power supply ：220V±10％/50HZ Language ：Chinese/English work condition ：Temperature 5-40℃，The relative humidity ≤75％ Leakage rate display range ：1x10-²~1x10-13Pa·m/s Leakage rate display range of suction gun：1x10-2~1x10-9Pa·m3/s Leak detection port specifications ：KF25 Response time ：≤0.3S Input/Output interface ：Digital and Analog I/O Maximum power ：950W Display units ：Pa·m³/s；mbar·l/s；atm·cc/s；ppm Weight ：≤110kg

ACheck the mechanical pump and connecting circuit for excessive working current of the box vacuum pump group mechanical pump

ACheck the working current of the Roots pump in the box vacuum pump group for excessive current, as well as the Roots pump and its connecting circuit

ACheck the leakage pump and its connecting circuit for excessive working current of the leak detection pump group

AThe working current of the recycling pump is too high. Check the recycling pump and its connecting circuit

ACheck the compressor and connecting circuit for excessive working current